Fundamental Electron Interactions with Plasma Processing Gases

číslo produktu:153654

rezervuj

Fundamental Electron Interactions with Plasma Processing Gases

Christophorou

Rok vydania: 2004

Vydavateľ: Springer

Kniha je momentálne nedostupná.

V prípade dlhodobého záujmu si urobte REZERVÁCIU a my vám odložíme žiadaný kus.

O knihe:

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Zaradenie do kategórii:

Podrobnosti o titule (výrobné údaje):

Vydavateľstvo: Springer

Rok vydania: 2004

ISBN: 978-0-306-48037-9

(9780306480379)

Väzba: tvrdá